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 # 100080
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(11) 100080 (51) (2015.01)
G01R 31/26 (2014.01)
G01N 13/00
G01N 27/406 (2006.01)
G01Q 10/00
G01Q 20/00
G01Q 60/00
(24) 10.07.2015
(21) u201500010 (22) 05.01.2015
(46) 10.07.2015, . 13
(71) (UA )
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TIUMENTSEV VOLODYMYR ANTONOVYCH (UA )
(72) (UA )
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Tiumentsev Volodymyr Antonovych (UA )
(73) , . , 4-, . 50, . , 58022 (UA )
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TIUMENTSEV VOLODYMYR ANTONOVYCH (UA )
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DEVICE FOR MEASURING electrophysical parameters of SEMICONDUCTOR MATERIALS
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(57)
   
 
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