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(11) 68897 (51) (2012.01)
G01C 22/00
G01B 11/00
(24) 10.04.2012
(21) u201113207 (22) 09.11.2011
(46) 10.04.2012, . 7
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MICRO-ELECTRONIC OPTICAL DEVICE FOR REGISTRATION OF DISPLACEMENT PROCESS
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