" ( ) "

³ ( )

 (0)

 (0)

    
  1 / 1 |   | | viewdetails | |  
 # 94799
в -ί ̲
      (uk)     (ru)     (en)      
( 20 .)  䳺
(11) 94799 (51) (2011.01)
H01J 27/00
(24) 10.06.2011
(21) a200909968 (22) 30.09.2009
(41) 11.04.2011, . 7
(46) 10.06.2011, . 11
(56) Q.Ji, L.Ji, Y. Chen and K.-N. Leung Combined electron- and ion-beam imprinter and it's applications Appl. Phys. Lett. 20, 4618 (2004).
SU 1570549 A1; 20.03.1995
GB 1500095 A; 08.02.1978
RU 81027 U1; 27.02.2009
JP 60235343 A; 22.11.1985
(71) ʲ ֲ Ͳ Ͳ .. Dz (UA )
...................................................................................................................................................................
.. (UA )
...................................................................................................................................................................
V.KARAZIN KHARKIV NATIONAL UNIVERSITY (UA )
(72) (UA ); ' (UA )
...................................................................................................................................................................
(UA ); (UA )
...................................................................................................................................................................
Dudin Stanislav Valentynovych (UA ); Rafalskyi Dmytro Viacheslavovych (UA )
(73) ʲ ֲ Ͳ Ͳ .. Dz, . , 4, . , 61077 (UA )
...................................................................................................................................................................
.. (UA )
...................................................................................................................................................................
V.KARAZIN KHARKIV NATIONAL UNIVERSITY (UA )
(98) ..,
., 4, ., 61077,
(UA)
(54) в -ί ̲
...................................................................................................................................................................
DEVICE FOR ION-ELECTRON TREATMENT OF SURFACES IN VACUUM
...................................................................................................................................................................
-
(57)
   
 
0.699903011322